Stress control for overlay registration in a-Si:H TFTs on flexible organic-polymer-foil substrates
I.-Chun Cheng, Alexis Kattamis, Ke Long, James C. Sturm, Sigurd WagnerVolume:
13
Year:
2005
Language:
english
DOI:
10.1889/1.2001213
File:
PDF, 3.47 MB
english, 2005