Stress control for overlay registration in a-Si:H TFTs on...

Stress control for overlay registration in a-Si:H TFTs on flexible organic-polymer-foil substrates

I.-Chun Cheng, Alexis Kattamis, Ke Long, James C. Sturm, Sigurd Wagner
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Volume:
13
Year:
2005
Language:
english
DOI:
10.1889/1.2001213
File:
PDF, 3.47 MB
english, 2005
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