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An LTPS active-matrix process with PECVD doped N+ drain/source areas
Holger Baur, Sven Jelting, Niels Benson, Norbert FruehaufVolume:
14
Year:
2006
Language:
english
DOI:
10.1889/1.2176113
File:
PDF, 7.19 MB
english, 2006