Cost-effective fabrication of submicron patterns under low pressure over a large area
Zin-Sig Kim, Kun-Sik Park, Kyu-Ha Baek, Lee-Mi DoVolume:
61
Language:
english
DOI:
10.3938/jkps.61.1088
Date:
October, 2012
File:
PDF, 185 KB
english, 2012