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Performance improvement with a combined scheme of rapid thermal annealing and multi-channel structure for poly-Si TFTs with various device dimensions
Ching-Lin Fan, Yi-Yan Lin, Yan-Hang YangVolume:
61
Language:
english
DOI:
10.3938/jkps.61.1308
Date:
October, 2012
File:
PDF, 307 KB
english, 2012