Electrical characterization of MIS devices using PECVD...

Journal of the Korean Physical Society 2012 / 07 Vol. 61; Iss. 1

Electrical characterization of MIS devices using PECVD SiNx:H films for application of silicon solar cells

Jin-Su Yoo, Jun-Sik Cho, Joo-Hyung Park, Seung-Kyu Ahn, Kee-Shik Shin, Kyung-Hoon Yoon, Junsin Yi
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Volume:
61
Language:
english
DOI:
10.3938/jkps.61.89
Date:
July, 2012
File:
PDF, 173 KB
english, 2012
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