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Surface recombination of oxygen atoms in O 2 plasma at increased pressure: II. Vibrational temperature and surface production of ozone
Lopaev, D V, Malykhin, E M, Zyryanov, S MVolume:
44
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/44/1/015202
Date:
January, 2011
File:
PDF, 1007 KB
english, 2011