Composition and thickness determination of thin oxide films: comparison of different programs and methods
Sammelselg, V., Aarik, J., Aidla, A., Kasikov, A., Heikinheimo, E., Peussa, M., Niinist, L.Volume:
14
Year:
1999
Language:
english
Journal:
Journal of Analytical Atomic Spectrometry
DOI:
10.1039/A806762G
File:
PDF, 123 KB
english, 1999