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Electrolyzed Water as the Novel Cleaning Media in Ultra-Large-Scale Integration and Liquid-Crystal Display Manufacturing
Yamanaka, Koji, Imaoka, Takashi, Futatsuki, Takashi, Yamashita, Yukimari, Mitsumori, Ken-ichi, Kasama, Yasuhiko, Aoki, Hidemitsu, Yamasaki, Shinya, Aoto, NahomiVolume:
15
Language:
english
Journal:
Langmuir
DOI:
10.1021/la981153r
Date:
June, 1999
File:
PDF, 155 KB
english, 1999