A High-Power Temperature-Stable Electrostatic RF MEMS Capacitive Switch Based on a Thermal Buckle-Beam Design
Mahameed, Rashed, Rebeiz, Gabriel M.Volume:
19
Year:
2010
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2010.2049475
File:
PDF, 1022 KB
english, 2010