A High-Power Temperature-Stable Electrostatic RF MEMS...

A High-Power Temperature-Stable Electrostatic RF MEMS Capacitive Switch Based on a Thermal Buckle-Beam Design

Mahameed, Rashed, Rebeiz, Gabriel M.
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Volume:
19
Year:
2010
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2010.2049475
File:
PDF, 1022 KB
english, 2010
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