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Phase-shift effects on growth and transport of dust particles in VHF capacitively coupled silane discharges: Two dimensional fluid simulation
Liu, Xiang-Mei, Song, Yuan-Hong, Xu, Xiang, Wang, You-NianVolume:
18
Year:
2011
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.3626544
File:
PDF, 2.48 MB
english, 2011