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Combined electrical and mechanical properties of titanium nitride thin films as metallization materials
Patsalas, P., Charitidis, C., Logothetidis, S., Dimitriadis, C. A., Valassiades, O.Volume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.371514
File:
PDF, 296 KB
english, 1999