![](/img/cover-not-exists.png)
Highly ionized fluxes of sputtered titanium atoms in high-power pulsed magnetron discharges
Kudláček, P, Vlček, J, Burcalová, K, Lukáš, JVolume:
17
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/17/2/025010
Date:
May, 2008
File:
PDF, 534 KB
english, 2008