Silylcarborane Acrylate Nanoimprint Lithography Resists

ACS Applied Materials & Interfaces 2009 / 09 Vol. 1; Iss. 9

Silylcarborane Acrylate Nanoimprint Lithography Resists

Simon, Yoan C., Moran, Isaac W., Carter, Kenneth R., Coughlin, E. Bryan
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Volume:
1
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am9002292
Date:
September, 2009
File:
PDF, 1.39 MB
english, 2009
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