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Silylcarborane Acrylate Nanoimprint Lithography Resists
Simon, Yoan C., Moran, Isaac W., Carter, Kenneth R., Coughlin, E. BryanVolume:
1
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am9002292
Date:
September, 2009
File:
PDF, 1.39 MB
english, 2009