Atomic-layer deposited IrO 2...

Journal of Physics D Applied Physics 2007 / 03 Vol. 40; Iss. 5

Atomic-layer deposited IrO 2 nanodots for charge-trap flash-memory devices

Choi, Sangmoo, Cha, Young-Kwan, Seo, Bum-Seok, Park, Sangjin, Park, Ju-Hee, Shin, Sangmin, Seol, Kwang Soo, Park, Jong-Bong, Jung, Young-Soo, Park, Youngsoo, Park, Yoondong, Yoo, In-Kyeong, Choi, Suk-
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Volume:
40
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/40/5/017
Date:
March, 2007
File:
PDF, 223 KB
english, 2007
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