Discharge in dual magnetron sputtering system

IEEE Transactions on Plasma Science 2005 / 04 Vol. 33; Iss. 2

Discharge in dual magnetron sputtering system

Musil, J., Baroch, P.
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Volume:
33
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/TPS.2005.844996
Date:
April, 2005
File:
PDF, 112 KB
english, 2005
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