Robust, High-Density Zinc Oxide Nanoarrays by Nanoimprint Lithography-Assisted Area-Selective Atomic Layer Deposition
Suresh, Vignesh, Huang, Meiyu Stella, Srinivasan, M. P., Guan, Cao, Fan, Hong Jin, Krishnamoorthy, SivashankarVolume:
116
Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/jp307152s
Date:
November, 2012
File:
PDF, 2.06 MB
english, 2012