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Photoelectrochemical etching of silicon
Claude Levy-Clement, Abdelghani Lagoubi, Reshef Tenne, Michael Neumann-SpallartVolume:
37
Year:
1992
Language:
english
Pages:
12
DOI:
10.1016/0013-4686(92)85039-n
File:
PDF, 1.47 MB
english, 1992