Silicon nanowire on oxide/nitride/oxide for memory...

Nanotechnology 2007 / 06 Vol. 18; Iss. 23

Silicon nanowire on oxide/nitride/oxide for memory application

Li, Qiliang, Zhu, Xiaoxiao, Xiong, Hao D, Koo, Sang-Mo, Ioannou, D E, Kopanski, Joseph J, Suehle, J S, Richter, C A
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Volume:
18
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/18/23/235204
Date:
June, 2007
File:
PDF, 939 KB
english, 2007
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