Full-field hard x-ray microscopy below 30 nm: a challenging nanofabrication achievement
Chen, Yu-Tung, Lo, Tsung-Nan, Chu, Yong S, Yi, Jaemock, Liu, Chi-Jen, Wang, Jun-Yue, Wang, Cheng-Liang, Chiu, Chen-Wei, Hua, Tzu-En, Hwu, Yeukuang, Shen, Qun, Yin, Gung-Chian, Liang, Keng S, Lin, HongVolume:
19
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/19/39/395302
Date:
October, 2008
File:
PDF, 2.12 MB
english, 2008