Plasma-Enhanced ALD of Platinum with O2, N2 and NH3 Plasmas

ECS Journal of Solid State Science and Technology 2012 / 10 Vol. 1; Iss. 6

Plasma-Enhanced ALD of Platinum with O2, N2 and NH3 Plasmas

Longrie, D., Devloo-Casier, K., Deduytsche, D., Van den Berghe, S., Driesen, K., Detavernier, C.
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Volume:
1
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/1.009206jss
Date:
October, 2012
File:
PDF, 1.37 MB
english, 2012
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