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Feedback-Linearized Inverse Feedforward for Creep, Hysteresis, and Vibration Compensation in AFM Piezoactuators
Leang, Kam K., Devasia, SantoshVolume:
15
Year:
2007
Language:
english
Journal:
IEEE Transactions on Control Systems Technology
DOI:
10.1109/TCST.2007.902956
File:
PDF, 953 KB
english, 2007