Design of ion energy distributions by a broad beam ion source
Zeuner, Michael, Meichsner, Jürgen, Neumann, Horst, Scholze, Frank, Bigl, FriederVolume:
80
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.362869
Date:
July, 1996
File:
PDF, 549 KB
english, 1996