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Phase Shift Corrections for Infrared Interference Measurement of Epitaxial Layer Thickness
Schumann, P. A., Phillips, R. P., Olshefski, P. J.Volume:
113
Year:
1966
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2423964
File:
PDF, 446 KB
english, 1966