Double probe diagnostics based on harmonic current detection for electron temperature and electropositive ion flux measurement in RF plasmas
Oh, Se-Jin, Choi, Ik-Jin, Kim, Jin-Yong, Chung, Chin-WookVolume:
23
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/23/8/085001
Date:
August, 2012
File:
PDF, 552 KB
english, 2012