Dynamic modeling and control of an atomic force microscope...

Journal of Vibration and Control 2012 / 01 Vol. 18; Iss. 1

Dynamic modeling and control of an atomic force microscope probe measurement system

Kuo, C.-F. J., Huy, V. Q., Chiu, C.-H., Chiu, S.-F.
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Volume:
18
Language:
english
Journal:
Journal of Vibration and Control
DOI:
10.1177/1077546310397794
Date:
January, 2012
File:
PDF, 467 KB
english, 2012
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