An LPV Design Approach for Voltage Control of an...

Journal of Microelectromechanical Systems 2011 Vol. 20; Iss. 1

An LPV Design Approach for Voltage Control of an Electrostatic MEMS Actuator

Shirazi, Farzad A., Mohammadpour Velni, Javad, Grigoriadis, Karolos M.
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Volume:
20
Year:
2011
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2010.2090651
File:
PDF, 997 KB
english, 2011
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