Fabrication of 3D nano-structures using reverse imprint...

Fabrication of 3D nano-structures using reverse imprint lithography

Han, Kang-Soo, Hong, Sung-Hoon, Kim, Kang-In, Cho, Joong-Yeon, Choi, Kyung-woo, Lee, Heon
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Volume:
24
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/24/4/045304
Date:
February, 2013
File:
PDF, 1.64 MB
english, 2013
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