Patterning of various silicon structures via polymer...

Nanotechnology 2011 / 07 Vol. 22; Iss. 27

Patterning of various silicon structures via polymer lithography and catalytic chemical etching

Lee, Jung-Pil, Bang, Byoung Man, Choi, Sinho, Kim, Taesung, Park, Soojin
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Volume:
22
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/22/27/275305
Date:
July, 2011
File:
PDF, 1.17 MB
english, 2011
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