Microgrippers: a case study for batch-compatible...

Nanotechnology 2007 / 09 Vol. 18; Iss. 37

Microgrippers: a case study for batch-compatible integration of MEMS with nanostructures

Sardan, O, Erdem Alaca, B, Yalcinkaya, A D, Bøggild, P, Tang, P T, Hansen, O
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Volume:
18
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/18/37/375501
Date:
September, 2007
File:
PDF, 1.61 MB
english, 2007
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