Fabrication and electromechanical actuation of epitaxial SrTiO 3 (0 0 1) microcantilevers
Biasotti, Michele, Pellegrino, Luca, Buzio, Renato, Bellingeri, Emilio, Bernini, Cristina, Siri, Antonio Sergio, Marré, DanieleVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/3/035031
Date:
March, 2013
File:
PDF, 1.60 MB
english, 2013