Low-temperature radiation-stimulated gettering of...

Technical Physics Letters 1997 / 07 Vol. 23; Iss. 7

Low-temperature radiation-stimulated gettering of impurities and defects in silicon by layers of porous silicon

A. V. Kulikov, V. A. Perevoshchikov, V. D. Skupov, V. G. Shengurov
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Volume:
23
Language:
english
DOI:
10.1134/1.1261728
Date:
July, 1997
File:
PDF, 46 KB
english, 1997
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