Applying reactive ionic-beam etching to correcting the...

Bulletin of the Russian Academy of Sciences: Physics 2012 / 02 Vol. 76; Iss. 2

Applying reactive ionic-beam etching to correcting the shape of X-ray mirrors

A. A. Akhsakhalyan, A. D. Akhsakhalyan, Yu. A. Vainer, D. G. Volgunov, M. V. Zorina, E. B. Kluenkov, L. A. Kaskov, M. I. Kuznetsov, L. M. Nefedov, N. N. Salashchenko, A. L. Kharitonov
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Volume:
76
Language:
english
DOI:
10.3103/s1062873812020025
Date:
February, 2012
File:
PDF, 150 KB
english, 2012
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