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Sensitivity analysis of periodic errors in heterodyne interferometry
Ganguly, Vasishta, Kim, Nam Ho, Kim, Hyo Soo, Schmitz, TonyVolume:
22
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/22/3/035305
Date:
March, 2011
File:
PDF, 1.61 MB
english, 2011