Etching and micro-optics fabrication in diamond using...

Diamond and Related Materials 2008 / 7 Vol. 17; Iss. 7-10

Etching and micro-optics fabrication in diamond using chlorine-based inductively-coupled plasma

Lee, C.L., Gu, E., Dawson, M.D., Friel, I., Scarsbrook, G.A.
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Volume:
17
Language:
english
Journal:
Diamond and Related Materials
DOI:
10.1016/j.diamond.2008.01.011
Date:
July, 2008
File:
PDF, 649 KB
english, 2008
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