Micro-vibration stage using piezo actuators
Guo, Jiang, Chee, Sze Keat, Yano, Takeshi, Higuchi, ToshiroVolume:
194
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2013.01.025
Date:
May, 2013
File:
PDF, 1.95 MB
english, 2013