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Thin-film piezoelectric-on-silicon resonators for high-frequency reference oscillator applications
Abdolvand, R., Lavasani, H., Ho, G., Ayazi, F.Volume:
55
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/TUFFC.2008.976
Date:
December, 2008
File:
PDF, 1.24 MB
english, 2008