Multifrequency Pierce Oscillators Based on Piezoelectric AlN Contour-Mode MEMS Technology
Chengjie Zuo,, Sinha, Nipun, Van der Spiegel, Jan, Piazza, GianlucaVolume:
19
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2010.2045879
Date:
June, 2010
File:
PDF, 1.45 MB
english, 2010