Analytical closed-form solutions for size-dependent static...

Analytical closed-form solutions for size-dependent static pull-in behavior in electrostatic micro-actuators via Fredholm integral equation

Rokni, Hossein, Seethaler, Rudolf J., Milani, Abbas S., Hosseini-Hashemi, Shahrokh, Li, Xian-Fang
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Volume:
190
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2012.10.035
Date:
February, 2013
File:
PDF, 950 KB
english, 2013
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