What We Learned and Used in the First Inductively Coupled...

Japanese Journal of Applied Physics 2011 / 8 Vol. 50; Iss. 8

What We Learned and Used in the First Inductively Coupled Plasma for Plasma Processing and in Later Development

Keller, John H.
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.50.08JA03
Date:
August, 2011
File:
PDF, 277 KB
english, 2011
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