Effective Species in Inductively Coupled Nitrogen Plasma...

Applied Physics Express 2011 / 7 Vol. 4; Iss. 8

Effective Species in Inductively Coupled Nitrogen Plasma for Silicon Nitriding

Horikawa, Yoshimine, Kurihara, Kazuaki, Sasaki, Koichi
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Volume:
4
Language:
english
Journal:
Applied Physics Express
DOI:
10.1143/APEX.4.086201
Date:
July, 2011
File:
PDF, 544 KB
english, 2011
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