Electron beam lithography in nanoscale fabrication: recent...

IEEE Transactions on Electronics Packaging Manufacturing 2003 / 04 Vol. 26; Iss. 2

Electron beam lithography in nanoscale fabrication: recent development

Tseng, A.A., Kuan Chen,, Chen, C.D., Ma, K.J.
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Volume:
26
Language:
english
Journal:
IEEE Transactions on Electronics Packaging Manufacturing
DOI:
10.1109/TEPM.2003.817714
Date:
April, 2003
File:
PDF, 1.57 MB
english, 2003
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