![](/img/cover-not-exists.png)
Swarm data of O − , NO − , He + , N 2 O + , and ions in N 2 O, He and N 2 O–He mixtures for PECVD applications
Yousfi, M, Hennad, A, Benhenni, MVolume:
40
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/40/6/023
Date:
March, 2007
File:
PDF, 854 KB
english, 2007