Amorphous SiCN diaphragm for transmission electron...

Vacuum 2013 / 2 Vol. 88

Amorphous SiCN diaphragm for transmission electron microscope with environmental-cell fabricated by plasma-enhanced chemical vapor deposition

Matsutani, Takaomi, Yamasaki, Kayo, Tsutsui, Hidenori, Miura, Takuya, Kawasaki, Tadahiro
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Volume:
88
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2012.03.033
Date:
February, 2013
File:
PDF, 1.08 MB
english, 2013
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