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Linewidth determination in local oxidation nanolithography of silicon surfaces
Tello, Marta, GarcıÌa, Fernando, GarcıÌa, RicardoVolume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1501753
File:
PDF, 867 KB
english, 2002