Internal Dielectric Transduction in Bulk-Mode Resonators
Weinstein, D., Bhave, S.A.Volume:
18
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2009.2032480
Date:
December, 2009
File:
PDF, 1.07 MB
english, 2009