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Structure and morphology of magnetron sputtered W films studied by x-ray methods
Salamon, K, Milat, O, Radić, N, Dubček, P, Jerčinović, M, Bernstorff, SVolume:
46
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/46/9/095304
Date:
March, 2013
File:
PDF, 2.23 MB
english, 2013