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Plasma-Enhanced Atomic Layer Deposition of Silver Thin Films
Kariniemi, Maarit, Niinistö, Jaakko, Hatanpää, Timo, Kemell, Marianna, Sajavaara, Timo, Ritala, Mikko, Leskelä, MarkkuVolume:
23
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm200402j
Date:
June, 2011
File:
PDF, 3.11 MB
english, 2011