2H-AlGaN/GaN HEMTs on 3C-SiC(111)/Si(111) Substrates

Materials Science Forum 2010 / 4 Vol. 645-648

2H-AlGaN/GaN HEMTs on 3C-SiC(111)/Si(111) Substrates

Tonisch, Katja, Jatal, Wael, Granzner, Ralf, Kittler, Mario, Baumann, Uwe, Schwierz, Frank, Pezoldt, Jörg
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Volume:
645-648
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.645-648.1219
Date:
April, 2010
File:
PDF, 567 KB
english, 2010
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