Quantification of the surface stress in microcantilever...

Nanotechnology 2012 / 11 Vol. 23; Iss. 47

Quantification of the surface stress in microcantilever biosensors: revisiting Stoney’s equation

Tamayo, Javier, Ruz, Jose J, Pini, Valerio, Kosaka, Priscila, Calleja, Montserrat
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Volume:
23
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/23/47/475702
Date:
November, 2012
File:
PDF, 700 KB
english, 2012
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