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Spectroscopic measurements of the electron temperature in low pressure radiofrequency Ar/H 2 /C 2 H 2 and Ar/H 2 /CH 4 plasmas used for the synthesis of nanocarbon structures
Gordillo-Vázquez, F J, Camero, M, Gómez-Aleixandre, CVolume:
15
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/15/1/007
Date:
February, 2006
File:
PDF, 479 KB
english, 2006